Persons

One of the plausible circuit engineering solutions for the capacitive accelerometers with the differential type sensing element has been considered. The test results of the prototype on a specialized stand have been presented.

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The equations for estimation of the true leak rate for the hermiticity testing of microelectronic devices and MEMS have been proposed.

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Two approaches used for justifying the reliability models - the physical-probabilistic and physical-statistical ones - have been considered. The equivalence of both approaches has been shown. Using the methods of individual forecasting, the assessment of the probability of the non-failure operation of the linear acceleration converter (PLD) sample using both methods has been made and it has given the same results.

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