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Evgeny P. Kitsyuk

SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Cand. Sci. (Eng.), Head of the Research Laboratory of Advanced Processes, SMC “Technological Centre” (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Georgiy S. Eritsyan

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Junior Scientific Researcher of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Dmitry G. Gromov

National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)
Dr. Sci. (Eng.), Prof. of the Institute of Advanced Materials and Technologies, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1); Senior Scientific Researcher, I. M. Sechenov First Moscow State Medical University (Russia, 119435, Moscow, Bolshaya Pirogovskaya st., 2, bld. 4)

Vasily I. Shevyakov

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
Dr. Sci. (Eng.), Prof. of the of Integrated Electronics and Microsystems, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)

Vadim S. Gornostay-Polsky

National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Integrated Electronics and Microsystems Department, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
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