Persons
Boris M. Simonov
National Research University of Electronic Technology, Russia, 124498, Moscow, Zelenograd, Shokin sq., 1
PhD student of the Institute of Nano- and Microsystem Technology, National Research University of Electronic Technology (Russia, 124498, Moscow, Zelenograd, Shokin sq., 1)
Акоп Тигранович Костанян
Marina V. Zueva
“IBS Saint Petersburg” LLC (Russia, 190000, Saint Petersburg, Angliiskaya naberezhnaya st., 70)